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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1997),
  • paper CFL4

Deep, vertical etching of hi-silica films for optical waveguide applications

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Abstract

Flame hydrolysis deposited (FHD) silica waveguides are very important for use in planar lightwave circuits (PLCs) because of their low loss and inherent compatibility with silica optical .fibers.1

© 1997 Optical Society of America

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