Abstract

The ability to understand, predict, and interpret fabrication yield is extremely important for efficient and cost-effective manufacturing. To the best of our knowledge, there is very, little understanding and no physically sound model. The common practice is to curve fit either a Gaussian or Gamma curve to the experimental histograms. Such fitting is often inappropriate and does not lead to physical understanding of crucial parameters for processing adjustments and improvements, Here, we present a yield theory derived from simple fundamental equations. This theory is compared with a large number of sets of experimental data, including threshold current, voltage, and wavelength distributions of both vertical-cavity surface-emitting lasers (VCSELs) and edge-emitting lasers. The theory agrees exceedingly well with experiments without use of any fitting parameters. Further, the theory presents physical interpretation for the distributions, which can lead to adjustment in fabrication to improve the yields. In this presentation, we will discuss the theory and its comparison with two sets of data.

© 1996 Optical Society of America