Abstract

Wavelength-division multiplexing (WDM) has been proposed as a means of increasing the capacity of an optical network.1 A key component for WDM systems is tunable optical filter. Among the most important performance requirements for such a device are low insertion loss, large tuning range, narrow transmission line-width, tuning speed, transmittance and linearity. Using a low-temperature, low-stress process that we recently developed,2 we have fabricated surface-micro-machined Fabry-Perot tunable filters on double polished silicon wafers.

© 1996 Optical Society of America

PDF Article
More Like This
Micromachined tunable three-dimensional solid Fabry-Perot etalons

L. Y. Lin, J. L. Shen, S. S. Lee, M. C. Wu, and M. Sergent
TuJ6 Optical Fiber Communication Conference (OFC) 1996

Electro Thermal and Electro Statical Actuation of a Surface Micromachined Tunable Fabry-Pérot Filter

C. Gierl, K. Zogal, H. A. Davani, and P. Meissner
JTuI73 CLEO: Applications and Technology (CLEO_AT) 2011

Speed and polarization characteristics of widely tunable micromachined GaAs Fabry-Perot filters

M. S. Wu, E. C. Vail, G. S. Li, L. Eng, and C. J. Chang-Hasnain
CThL4 Conference on Lasers and Electro-Optics (CLEO) 1995

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription