Wavelength-division multiplexing (WDM) has been proposed as a means of increasing the capacity of an optical network.1 A key component for WDM systems is tunable optical filter. Among the most important performance requirements for such a device are low insertion loss, large tuning range, narrow transmission line-width, tuning speed, transmittance and linearity. Using a low-temperature, low-stress process that we recently developed,2 we have fabricated surface-micro-machined Fabry-Perot tunable filters on double polished silicon wafers.

© 1996 Optical Society of America

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