Abstract

Recently, a unique dual-laser ablation process for the deposition of essentially particulate-free optical films has been demonstrated.¹ A temporally synchronized combination excimer (KrF) and CO₂ laser pulses eliminated the particulates that exist in films deposited by single-excimer-laser ablation. Successful particulate-free deposition required careful control of CO₂-laser fluence and adjustment of the interpulse timing such that the 20-ns KrF-laser pulse arrived at the target on the rising edge of the 120-ns-FWHM CO₂-laser pulse.

© 1995 Optical Society of America