Abstract

Recently, vacuum-ultraviolet (VUV) radiation generated by high-order anti-Stokes stimulated Raman scattering (ASRS) was successfully applied to materials processing.^1,2 For efficient fabrication, nonirregular spatial beam profiles as well as high output energy are highly desirable, because they allow uniformity of treated surfaces and fast processing. To achieve higher output with such high-order anti-Stokes pulses, extensive efforts have been made. In contrast, however, the beam quality of such VUV pulses has attracted little attention.

© 1995 Optical Society of America