Abstract
We have fabricated etched-pillar vertical-cavity surface-emitting laser diodes (VCSELs) with submilliampere threshold currents and maximum output power levels of over 1 mW. Figure 1 shows a schematic diagram of the device. The epitaxial layers were grown by molecular-beam epitaxy. The n-doped bottom and p-doped top Bragg reflectors consist of 17.5 and 18 periods AlAs-GaAs quarter-wave stacks with graded interfaces, respectively.
© 1995 Optical Society of America
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