Abstract

In this paper, we report what is to our knowledge the first use of a metal–semiconductor–metal (MSM) waveguide structure to achieve high-contrast all-optical switching. This work attempts to unite three vital technologies by combining the potential of all-optical switching, the high-speed response of MSM detectors, and the reliable fabrication processes of VLSI electronics into one simple device. An interdigitated array of metal fingers on a silicon waveguide allows for (i) efficient waveguide coupling by taking advantage of the surface-plasmon resonance; (ii) electrical bias capability, which can provide modulation, tuning, and enhanced speed; and (iii) fabrication processes that are well understood and are fully compatible with current semiconductor manufacturing standards.

© 1995 Optical Society of America