Abstract
For the generation of XUV radiation, nonlinear optical frequency conversion processes can be used, starting from high-intensity laser systems in the near infrared, visible, or UV spectral range. For the longer wavelengths lasers, as Nd:glass and Tbsapphire, high order processes are needed, while when starting from the short- wavelength excimer lasers, as KrF (248 nm) or ArF (193 nm), efficient lower order processes are possible.
© 1994 Optical Society of America
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