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Conferences > CLEO > 1994 > CThS > CThS4
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CThS4

Ablation of polyfluorocarbon films with femtosecond Ti:sapphire laser pulses

Shinki Nakamura, Takuya Okamoto, Hiroshi Kumagai, Katsumi Midorikawa, Minoru Obara, and Koichi Toyoda

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Abstract

Ablation of fluorocarbon films such as polytetrafluoroethylene (PTFE) is difficult since their absorption starts in the vacuum ultraviolet (VUV) region. In the early work using nanosecond ultraviolet (UV) lasers, the films were ablated with a large threshold fluence and the ablated peripherals were not in good condition, mainly due to their small absorption in the UV.

© 1994 Optical Society of America

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