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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1994),
  • paper CThS2

Mechanism of high aspect ratio high quality drilling on optical substrates by high repetition rate laser

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Abstract

The growing technological interest in laser material processing and micro machining techniques draws an increasing attention to the peculiar mechanism of hole drilling on transparent substrates by high repetition frequency pulsed lasers.

© 1994 Optical Society of America

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