Abstract
Recent work using electro-optic (EO) polymers as channel waveguides has shown that active devices such as optical modulators, couplers, and switches, as well as passive waveguides, can be integrated into a single planar level on top of a Si (or other) substrate.1 A further increase in the degree of integration could be achieved by placing one level of planar polymer devices on top of another, resulting in a multilevel structure for optical devices. For this purpose, EO polymers have significant advantages over inorganic materials, such as LiNbO3 and GaAs, because one polymer layer can easily be placed on top of another using relatively low processing temperatures, and the underlying substrate, such as an semiconductor wafer, will not be affected.
© 1992 Optical Society of America
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