Abstract

Some attempts have been reported to increase the repetition rate of excimer lasers, say, a 2-kHz XeF laser using a fast gas blow down system1 and a 1-kHz KrF laser at an output of 200 W in a few minutes,2 Recently, Sentis et al. demonstrated a 1-kHz XeCl laser at an output of 200 W and up to 1.7 kHz in a burst mode operation of 200 shots, using a wire ion plasma x-ray gun for preionization Meanwhile, we have published the 2.5-kHz XeCl laser with 87-W output power, circulating gas by a high head axial blower.4

© 1992 Optical Society of America

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References

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