In optoelectronic or photonic integrated circuits (OEICs, PICs), lasers that can be processed·with precise control of the waveguide structure and metal contacts to achieve good performance and high yield are important. By using a self-aligned reactive ion etching and selective wet chemical etching combination, we have fabricated InGaAs/InGaAsP strained SQW polyimide-buried ridge guide lasers with very low internal waveguide losses.1 This laser structure has demonstrated near 100% yields of Fabry-Perot MQW laser chips grown by chemical beam epitaxy.2 High bandwidth operation (20 GHz) has also been reported for InGaAs/GaAs MQW lasers fabricated with the polyimide-buried ridge guide structure.3 Recently, we have demonstrated a 5-Gbit/s OEIC transmitter comprising a polyimide-buried self-aligned ridge guide Fabry-Perot laser and an HBT driver circuit.4 In this paper, we report, we believe for the first time, the use of the polyimide-buried self-aligned ridge guide structure for distributed feedback (DFB) lasers. The 1.55-μm strained MQW DFB lasers were grown by two-step metalorganic vapor phase epitaxy (MOVPE). Low threshold currents (near 10 mA) and single-mode output with >40 dB side-mode suppression were demonstrated. These high performance DFB lasers may be attractive for OEIC/PIC technologies in the future.

© 1992 Optical Society of America

PDF Article
More Like This
High Power InGaAs-GaAs-InGaP Distributed Feedback Buried Heterostructure Strained Quantum Well Lasers at 0.98µm

Y. K. Sin, H. Horikawa, C. Q. Xu, and T. Kamijoh
TUC4 Optical Amplifiers and Their Applications (OAA) 1993

Low distortion over wide-band modulation of 1.55-μm MQW distributed-feedback lasers

N. Otsuka, M. Ishino, M. Kito, K. Hoshino, K. Fujihara, K. Fujito, and Y. Matsui
FB5 Optical Fiber Communication Conference (OFC) 1992

Digital high speed and analog transmission using 1.55-µm strained lasers

U. Cebulla, J. Bouayad, H. Haisch, M. Klenk, H. P. Mayer, R. Weinmann, and E. Zielinski
CTuA6 Conference on Lasers and Electro-Optics (CLEO) 1992


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access Optica Member Subscription