Abstract
High-repetition-rate excimer and CO2 TEA lasers with output powers extending into the kilowatt range are becoming important in a large number of scientific and industrial applications. Maximum outputs of 750 W have been reported for discharge excited excimer lasers1 and 10 kW for CO2 TEA lasers2 at repetition rates of 500 Hz and 1 kHz, respectively. However, these lasers are not yet commercially compatible. We have, therefore, initiated an extensive R&D program, aimed at the development of high-repetition rate, high-average-power industrial excimer and CO2 TEA laser systems with projected repetition rates of several Kilohertz and multi-kilowatt outputs.3
© 1991 Optical Society of America
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