Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper CThR26

Damage threshold study of magnetron-sputter deposited multilayer mirrors for quasi-cw high-power excimer lasers

Not Accessible

Your library or personal account may give you access

Abstract

We have fabricated Al2O3/SiO2 multilayer mirrors for KrF and XeCl excimer lasers using the newly developed magnetron-sputter-deposition technique, and studied the reflection and the heat-treatment characteristics. High damage-threshold mirrors with a reflectivity of 99% have been obtained.

© 1991 Optical Society of America

PDF Article
More Like This
Magnetron sputtered interference filters with high laser damage threshold

Harro Hagedorn, Walter Lehnert, Jürgen Pistner, Michael Scherer, and Alfons Zöller
FB.2 Optical Interference Coatings (OIC) 2013

XUV Mo/Si Multilayer Mirrors Deposited by RF Magnetron Sputtering

Claude Montcalm, Brian T. Sullivan, Henri Pépin, and J.A. Dobrowolski
MC11 Physics of X-Ray Multilayer Structures (PXRAYMS) 1992

Improvements in damage thresholds for high-energy lasers

Frank Rainer
TuQ2 OSA Annual Meeting (FIO) 1991

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved