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Conferences > CLEO > 1991 > CThQ > CThQ4
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1991),
  • paper CThQ4

Laser-beam scanning CVD technique for control of spatial thickness distribution of thin films

Yuka Yamada, Katsuhiko Mutoh, Takashi Iwabuchi, and Takeo Miyata

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Abstract

We have developed the new laser-beam-scanning, chemical vapor deposition (CVD) apparatus for the control of spatial thickness distribution of films and have demonstrated that the distributions of the deposited films correspond directly to laser-beam scanning modes. This method should be applied to the fabrication of large-area x-ray multilayer minors with uniform or controlled, nonuniform thicknesses.

© 1991 Optical Society of America

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