Ripplelike damage patterns resulting from the laser irradiation of various materials have been discussed extensively in the literature.1,2 These laser-induced periodic surface structures (LIPSSs) have been, formed in metals, semiconductors, and dielectrics using laser wavelengths ranging from the UV to the IR. Here we present new observations of LIPSS formed in polymer films ablated using excimer lasers. It is shown that well defined and ordered surface structuring can occur over areas which are greatly in excess of the coherence area of the laser. This result may have implications for the use of excimer lasers in high resolution lithographic and micromachining applications and may also contribute to the initiation of complex surface patterns that develop when oriented polymers are ablated.

© 1990 Optical Society of America

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