Abstract
Tungsten-carbon (W/C) multilayers for x-ray optics were prepared by argon-fluoride (ArF) excimer laser-induced chemical vapor deposition (LCVD) using tungsten hexafluoride (WF6) and benzene (C6H6) gases. We analyzed the multilayer structure by the small angle x-ray scattering method and also determined the multilayer depth profile by Auger electron spectroscopy (AES).
© 1990 Optical Society of America
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