Abstract
The further development of discharge excimer lasers deals with methods for obtaining a higher efficiency and better degree of control over the discharge stability. A problem is the large difference between the breakdown and steady state voltage which requires a time-dependent voltage of the power circuit for optimum impedance matching. Furthermore, the large attachment rates of halogens like CI2 and F2 causing electric field disturbances require a short rise time of the applied current pulse. A large effort has been expended toward this goal by researchers since the early development of discharge excimer lasers.
© 1990 Optical Society of America
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