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  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1990),
  • paper CTHB2

Development of a high power excimer laser with surface corona discharge preionization

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Abstract

High power output to be compatible with a reliable operating performance is an essential requirement for the industrial use of excimer lasers in microprocessing of large surface area targets.

© 1990 Optical Society of America

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