Laser generated plasmas (LGPs) have been of great interest in using intense soft x-rays in x-ray lithography,1 x-ray microscopy,2 and so on. Many papers have been published on laser generated x-ray sources using a multistage laser fusion system.3 We report the properties and use of a repetitive plasma x-ray source produced by a compact Q-switched zigzag glass slab laser (slab size, 221 × 65 × 5 mm; wavelength, 1.054 μm, 8 J/40 ns) whose repetitive rate can be as high as 3 Hz.

© 1990 Optical Society of America

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