The preionization and output characteristics of an x-ray preionized discharge pumped KrF laser with a 10-cm electrode spacing are described. The laser has been developed as the final stage amplifier of a short (ps-fs) pulse excimer laser amplification system. The laser system has been described elsewhere.1,2 When the laser was operated at a PFL voltage of VPFL = 400 kV as a XeCl laser oscillator, an output energy of 50 J in an 85-ns optical pulse was extracted from an active volume of ~10 liters.2 For KrF laser experiments, the insulation between the high voltage electrode and the laser chamber was made by a polyvinylidene fluoride insulator. A new Marx generator with a divertor switch was employed for the generation of the e-beam.

© 1989 Optical Society of America

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription