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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper WJ5

Fabrication of a high-packing-density microlens array by photopolymerization

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Abstract

We devised a fabrication method to produce plano-convex microlenses from a film composed of a photopolymerizable monomer, such as cinnamic acid derivatives, and a binding polymer, such as polymethylmethacrylate. The method, shown in Fig. 1, consists of three processes: coating, in which a film is formed on a glass substrate; selective exposure, in which microlenses are produced in the film using a photolithographic technique; aftertreatment, in which the shapes of the lenses are fixed by exposing the film to UV light.

© 1988 Optical Society of America

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