Abstract

Reliable operation of high-power excimer lasers is limited by the restricted switching capability of available thyratrons. Methods to reduce the stress of the thyratrons are magnetic pulse compression, operation of several thyratrons in parallel, and the use of new switching elements. We used a new type of high-voltage switch—the multichannel pseudospark switch (VIPS)—to operate a high-power excimer laser.

© 1988 Optical Society of America

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