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The use of excimer lasers is often limited by an output power that decreases quickly with time. This decrease in output power is caused primarily by relatively short optic and gas lifetimes due to halogen-material interactions. As a result, the interaction of common structural materials with HCI and F2 is being studied. The goal of the study is either to stabilize the current materials to HCI or F2 attack or to find better materials.
© 1988 Optical Society of America
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