Abstract

Although preionization of laser gases by UV or x-ray photoionization is important for stabilizing the discharge in the excimer laser, the actual breakdown voltage of the main discharge with the preionization becomes much lower than that without the preionization. To Increase the starting voltage of the discharge, a high-speed high-current switch such as a thyratron is needed for efficient laser operation in the preionization stabilized excimer laser.

© 1988 Optical Society of America

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