Abstract
We have demonstrated a maskless technique for laser direct writing of optical waveguide structures. The technique utilizes a commercially available UV curable, optical-quality polymer (Norland 61, n = 1.56).1 The polymer is spun (120 s at 2000 rpm) onto a substrate in a manner analogous to photoresist and subsequently exposed using the 350–360-nm lines of an Ar-ion laser. After exposure, the substrate is developed in a solvent such as cyclopentanone, which removes the unexposed regions of the polymer.
© 1988 Optical Society of America
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