Abstract
Electron-beam lithography has significant advantages over the optical interference lithography in making gratings for DFB lasers.1 Until now firstorder gratings generated by e-beam lithography have been used to fabricate 1.5-μm DFB ridge- waveguide lasers,2 which are weakly index-guided. For narrow linewidth, we chose the strongly index-guided double-channel planar buried heterostructure (DCPBH).3
© 1988 Optical Society of America
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