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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1988),
  • paper MB5

Narrow-linewidth 1.3-μm DFB-DCPBH lasers with λ/4-shifted first-order gratings fabricated by electron-beam lithography using a new fast resist

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Abstract

Electron-beam lithography has significant advantages over the optical interference lithography in making gratings for DFB lasers.1 Until now firstorder gratings generated by e-beam lithography have been used to fabricate 1.5-μm DFB ridge- waveguide lasers,2 which are weakly index-guided. For narrow linewidth, we chose the strongly index-guided double-channel planar buried heterostructure (DCPBH).3

© 1988 Optical Society of America

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