Laser Direct Writing of Aluminum Interconnects

T. Cacouris; G. Scelsi; R. Beach; R. M. Osgood; R. R. Krchnavek

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1987),
paper ThU14

Laser Direct Writing of Aluminum Interconnects

T. Cacouris, G. Scelsi, R. Beach, R. M. Osgood, and R. R. Krchnavek

Conference on Lasers and Electro-Optics 1987

Baltimore, Maryland United States
26 April–1 May 1987
ISBN: 0-936659-49-1

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T. Cacouris, G. Scelsi, R. Beach, R. M. Osgood, and R. R. Krchnavek, "Laser Direct Writing of Aluminum Interconnects," in Conference on Lasers and Electro-Optics, D. Auston, R. Jacobs, R. Bartolini, and P. Liao, eds., Vol. 14 of OSA Technical Digest (Optica Publishing Group, 1987), paper ThU14.

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Abstract

We report, for the first time, laser direct writing of good conducting aluminum interconnects. These lines were deposited from a metallorganic gas with a focused deep-uv beam and were directly connected to aluminum test, structures.

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