Add to BibSonomyAbstract
Structured deposition and/or reduced substrate temperatures are the most promising features for laser MOCVD, especially when excimer lasers are considered as the photolysis source. A detailed knowledge of the excimer laser-induced photoproducts from a vast variety of organometallic compounds is needed for selection of the appropriate molecule, laser wavelength, and intensity for a given deposition process.
© 1986 Optical Society of America
PDF ArticleMore Like This
Excimer laser photochemistry of Al-alkyls monitored by dye laser mass spectroscopy
Y. Zhang, M. Stuke, R. Larciprete, and E. Borsella
ThD2 Lasers in Material Diagnostics (LMD) 1987
Isotope selective ionization of tellurium dimers after excimer laser photodissociation of an organometallic compound; CH3TeTeCH3
R. Larciprete and M. Stuke
MG3 Conference on Lasers and Electro-Optics (CLEO:S&I) 1986
Laser-induced ionization spectroscopy of small biological precursors in supersonic beam-mass spectrometry
David M. Lubman, Roger Tembreull, Chung Hang Sin, and Homing Pang
TUE3 International Laser Science Conference (ILS) 1986