Abstract

The presentation consists of three parts: (1) A kinetic theory of laser photochemical deposition starts with definitions of relevant physical quantities such as dissociation cross section per molecule in gas phase, adsorbed phases, and an enhancement factor. Based on kinetic considerations, six dimensionless quantities are introduced to characterize the laser photodeposition processes. The first three of them characterize the relative importance of one factor vs the other, as follows.

© 1986 Optical Society of America