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Self-coupling laser diode interferometry for profilometry applications

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Abstract

We present an optical interferometer based on a laser diode which offers the potential of developing a small noncontact profilometer with high resolution and large measurement range. The method uses both the self-coupling effect1·2 and the tunability3 in laser diodes. A null method also is introduced to eliminate the measurement error due to variations of surface reflectance.

© 1986 Optical Society of America

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