Optically scanned phase sensitive micro-scope

R. L JUNGERMAN; P. C. D. HOBBS; G. S. KINO

doi:10.1364/CLEO.1985.TUB3

Conference on Lasers and Electro-Optics
OSA Technical Digest (Optica Publishing Group, 1985),
paper TUB3
•https://doi.org/10.1364/CLEO.1985.TUB3

Optically scanned phase sensitive micro-scope

R. L JUNGERMAN, P. C. D. HOBBS, and G. S. KINO

Conference on Lasers and Electro-Optics 1985

Baltimore, Maryland United States
21–24 May 1985
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Unconventional Imaging Sensors (TUB)

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R. L. JUNGERMAN, P. C. D. HOBBS, and G. S. KINO, "Optically scanned phase sensitive micro-scope," in Conference on Lasers and Electro-Optics, A. Gara, C. Giuliano, D. Auston, and R. Jacobs, eds., OSA Technical Digest (Optica Publishing Group, 1985), paper TUB3.

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Abstract

Optical microscopy is widely used as a method of evaluating small-scale surface features. In examining these features, quantitative information about both the lateral dimensions and height is of Interest.

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