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Elimination of surface tracking for low-inductance laser head design

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Abstract

A major problem in scaling discharge-excited excimer lasers to large volumes is the increase in the rise time of the discharge current due to the high inductance of the laser head. Minimizing the head inductance has been limited by the tendency of the discharge to track along the walls. Attention to the causes and prevention of surface tracking is necessary to extend the volumetric scaling of these lasers.

© 1985 Optical Society of America

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