Abstract

Excimer lasers have important applications in the micromachining of both organic polymers and biological materials because of their capability for highly localized surface layer removal combined with excellent spatial resolution and an apparently low heat affected zone.^1,2 Excimer laser projection micromachining of thin free-standing polymer films is described; this technique provides a sensitive means of evaluating potentially disruptive mechanisms such as melting, stress relaxation, and ablation pressure in the interaction.

© 1985 Optical Society of America