Abstract
Oxygen is an unintentional dopant in Czochralski grown silicon crystals. Depending upon the amount and distribution of oxygen atoms, they can be either harmful or beneficial to device performance.1
© 1984 Optical Society of America
PDF ArticleMore Like This
Toshiro Koizumi, Hideo Tashiro, Koichi Toyoda, and Susumu Namba
FM6 Conference on Lasers and Electro-Optics (CLEO:S&I) 1984
Raoul-Amadeus Lorbeer, Oliver Kliebisch, Peter Mahnke, Cristina Beneitez Ortega, Francesco Di Capua, Julian Weber, and Matthias Damm
SM1B.6 Optical Sensors (Sensors) 2020
Christopher R. Webster and Robert T. Menzies
TUF2 Conference on Lasers and Electro-Optics (CLEO:S&I) 1984