Abstract

Based on its importance in the thermal and photochemical decomposition of silane, the reactive species silyene (SiH2) has been postulated as a potentially important intermediate in the glow discharge deposition of amorphous hydrogenated silicon.1,2 Using the novel technique of frequency modulation (FM) absorption spectroscopy,3 we have unambiguously detected SiH2 in dc glow discharges using its known electronic absorption spectrum.4 In all, 99 single rotational lines of the 2-0 and 1-0 vibronic bands have been assigned with a rms deviation of 0.03 cm−1 from the known4 line positions. Figure 1 shows a 1-cm−1 scan through two lines belonging to a K-doublet of the 2-0 band.

© 1984 Optical Society of America

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References

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