Abstract
Pulsed laser irradiation of solids under a gas ambient can create a reactive plasma near the surface, resulting in low-temperature chemical modification of surface films. This process, laser-pulsed plasma chemistry (LPPC),1,2׳ Is responsible for single-pulse self-limiting oxide growth when a CO2 laser irradiates niobium metal under 1 atm of oxygen.
© 1983 Optical Society of America
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