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Laser-pulsed plasma chemistry

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Abstract

Pulsed laser irradiation of solids under a gas ambient can create a reactive plasma near the surface, resulting in low-temperature chemical modification of surface films. This process, laser-pulsed plasma chemistry (LPPC),1,2׳ Is responsible for single-pulse self-limiting oxide growth when a CO2 laser irradiates niobium metal under 1 atm of oxygen.

© 1983 Optical Society of America

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