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High-density Schottky barrier IRCCD sensors for remote-sensing applications

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Abstract

Schottky-barrier IR charge-coupled devices (IRCCD) offer an attractive approach to satellite remote sensing in the SWIR (1-3.5-μm) spectral band. Monolithic palladium silicide (Pd2Si) Schottky barrier focal planes have been demonstrated which operate at satellite passive cooling temperatures. These silicon imagers operate in the temperature range between 40 and 140 K with a typical dark current at 120 K of 2 nA/cm2.

© 1983 Optical Society of America

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