Add to BibSonomyAbstract
Spatial period division1-3 is a lithographic technique in which a pattern of spatial period P/m is exposed by the diffraction field of a mask having a spatial period P. We have used an ArF laser (λ= 193 nm) and a mask of spatial period 199 nm to expose a 99.5-nm period grating pattern in PMMA.
© 1982 Optical Society of America
PDF ArticleMore Like This
Gratings and grating devices in structured fibres using 193nm from an ArF laser
John Canning
BWC1 Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides (BGPP) 2007
Generation of Tunable, Coherent 79 nm Radiation by Frequency Mixing
H. Egger, T. Srinivasan, K. Boyer, H. Pummer, and C. K. Rhodes
WB2 Laser Techniques for Extreme Ultraviolet Spectroscopy (EUVS) 1982
Fiber Bragg Grating Inscription in Endlessly Single Mode Photonic Crystal Fiber Using Direct Write ArF Laser
Desmond Baccini, Kevin Cook, John Canning, Gary Allwood, Graham Wild, and Steven Hinckley
BTh1B.3 Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides (BGPP) 2016