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Tunable Si photodiode with integrated Fabry-Perot interference filter

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Abstract

A simple tunable Si photodiode detector has potential applications in process controls, intrusion detectors, and biomedical instrumentation among many others. Current monochromatic detectors are available in hybrid packages with expensive multilayer dielectric filters mounted in front of Si photodiodes in hermetic enclosures.

© 1981 Optical Society of America

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