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Conferences > ASSP > 2009 > MF > MF7

Practical Compact Spatially-Coherent, Phase-Matched Extreme UV Source at 50 kHz

M.-C. Chen, M. R. Gerrity, T. Popmintchev, S. Backus, X. Zhang, M. M. Murnane, and H. C. Kapteyn

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Abstract

We report the first efficient source of spatially-coherent extreme-UV light at the high repetition rates (>50kHz) needed for metrology and imaging applications. This practical compact tabletop EUV source uses IR pulse energy of only 25μJ.

© 2009 Optical Society of America

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