Abstract
We have been developing a high repetition (5–100 kHz) and high power Nd: YAG laser system pumped by cw LDs. Average power of 4.6 kW was obtained at 28.8 kW of pumping power.
© 2008 Optical Society of America
PDF ArticleMore Like This
Hisanori Fujita, Masahiro Nakatsuka, Ravi Bhushan, Kouji Tsubakimoto, Hidetsugu Yoshida, Noriaki Miyanaga, and Yasukazu Izawa
TuA3_2 Conference on Lasers and Electro-Optics/Pacific Rim (CLEO/PR) 2007
H. Fujita, K. Tsubakimoto, H. Yoshida, R. Bhushan, N. Miyanaga, and M. Nakatsuka
CA5_2 The European Conference on Lasers and Electro-Optics (CLEO/Europe) 2009
D. R. Kania, D. P. Gaines, M. Hermann, J. Honig, R. Hostetler, R. Levesque, G. E. Sommargren, R. C. Spitzer, and S. P. Vernon
SEL.234 Extreme Ultraviolet Lithography (EUL) 1994