Precise Laser Cutting of Ceramic Matrix Composites using Short Pulse Hybrid ArF Laser

Yasuhiro Kamba; Hironori Igarashi; Takashi Onose; Yoshihiko Murakami; Hiroaki Oizumi; Taisuke Miura; Kouji Kakizaki

doi:10.1364/ASSL.2020.JTh6A.26

Laser Congress 2020 (ASSL, LAC)
OSA Technical Digest (Optica Publishing Group, 2020),
paper JTh6A.26
•https://doi.org/10.1364/ASSL.2020.JTh6A.26

Precise Laser Cutting of Ceramic Matrix Composites using Short Pulse Hybrid ArF Laser

Yasuhiro Kamba, Hironori Igarashi, Takashi Onose, Yoshihiko Murakami, Hiroaki Oizumi, Taisuke Miura, and Kouji Kakizaki

Advanced Solid State Lasers 2020

Washington, D.C. United States
13–16 October 2020
ISBN: 978-1-943580-84-2

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Joint Poster Session III (JTh6A)

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Y. Kamba, H. Igarashi, T. Onose, Y. Murakami, H. Oizumi, T. Miura, and K. Kakizaki, "Precise Laser Cutting of Ceramic Matrix Composites using Short Pulse Hybrid ArF Laser," in Laser Congress 2020 (ASSL, LAC), P. Schunemann, C. Saraceno, S. Mirov, S. Taccheo, J. Nilsson, A. Petersen, D. Mordaunt, and J. Trbola, eds., OSA Technical Digest (Optica Publishing Group, 2020), paper JTh6A.26.

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Abstract

We demonstrated a precise laser machining on SiC/SiC CMC plate using short pulsed hybrid ArF laser at the wavelength of 193 nm. We made 3x3 squared holes with dimension of 0.4×0.4 mm².

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