We report a high-repetition-rate, picosecond fiber master-oscillator and power-amplifier system operating at 120 and 240 MHz in the pulse range of 28-87 ps and its fifth-harmonic generation for semiconductor inspection at 213 nm.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription