Thin film micro-optics has been used for mode stabilization in a compact, diode-pumped Nd-doped solid-state laser. SiO2-microlenses and SiO2:HfO2-multilayer micro-mirrors have been tested in different resonator configurations starting from a hemispherical geometry. By comparing the stability behavior with the case of a macroscopic mirror it has been demonstrated that similar operation characteristics at a reduced output power can be achieved with a miniaturized laser. The special design of the thin film micro-optics can be used to enhance the mode-selectivity by spatial as well as spectral filtering with non-spherical phase distributions and profiled multilayer systems.

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