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Micromachined tunable optoelectronic devices for spectroscopic applications

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Abstract

Micromachined tunable optoelectronic devices can be used to improve spectroscopic measurements. The standing wave enhancement effect in Fabry-Perot cavities can be used to increase sensitivity. The size and cost of semiconductor micromachined devices make them an attractive alternative to conventional tabletop spectroscopy setups. Recent advances in micromachined tunable optoelectronic devices and their application to spectroscopy are described.

© 1999 Optical Society of America

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