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Conferences > ASA > 2017 > AS3A > AS3A.14

Detection system of tin droplet used for extreme ultraviolet emission sources

Haidong Lei, Hui Lan, and Ziqi Chen

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Abstract

The detection system has been build up to obtain the characteristic parameters of tin droplet and tested by a 32 kHz tin generator at gas pressure 0.4 MPa to 0.8 MPa. With the increasing of the gas pressure, droplet diameter slightly increases, droplet lateral stability raise but vertical stability reduce.

© 2017 Optical Society of America

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