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  • Asia Optical Fiber Communication and Optoelectronic Exposition and Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FD6
  • https://doi.org/10.1364/AOE.2008.FD6

Optical Electrostatic MEMS for Wavelength Switching

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Abstract

An electrostatic micromirror is designed and fabricated using a standard MicroElectroMechanical Systems (MEMS) process. Active control approaches are proposed for driving actuation to eliminate micromirror “pull-in” achieving enhanced device performance and functionality.

© 2008 Optical Society of America

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