We present the evolution of initial imaging experiments and micro-electro-mechanical systems mirrors toward a commercialized product. Feasibility of 10-mm-diameter freestanding SU-8 deformable mirrors for achieving fast focus and zoom in microscopy is also shown.

© 2019 The Author(s)

PDF Article


You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
Login to access OSA Member Subscription